Employer with a benefit plan ยท SEC filer
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DR, BEVERLY, MA 019151066
EIN
34-1818596
SEC CIK
0001113232
SEC · 2026-08-06
Industry (SIC)
Special Industry Machinery, NEC (3559)
SEC · 2026-08-06
State of incorporation
DE
SEC · 2026-08-06
Ticker
ACLS
SEC · 2026-08-06
Latest SEC filing
10-Q 2026-08-06
SEC · 2026-08-06
Benefit plan 1, 2024 filing
AXCELIS TECHNOLOGIES, INC. LONG-TERM INVESTMENT PLAN
DOL · 2025-08-28
Participants (start of year)
1,506
DOL · 2025-08-28
Plan features
code 2E2F2G2J2K2R2T
DOL · 2025-08-28
Plan type
Single-employer plan
DOL · 2025-08-28
Business code (NAICS)
334410
DOL · 2025-08-28
Benefit plan 501, 2024 filing
AXCELIS TECHNOLOGIES, INC. GROUP WELFARE PLAN
DOL · 2025-07-03
Participants (start of year)
1,130
DOL · 2025-07-03
Plan features
code 4A4B4H4L
DOL · 2025-07-03
Plan type
Single-employer plan
DOL · 2025-07-03