EntityWire

EntityWire / EIN 94-2276314

Employer with a benefit plan

ONTO INNOVATION

EIN 94-2276314. What DOL Form 5500 filings (EFAST2) and SEC EDGAR company filings say about this entity, with the source and date on every fact. Latest record 2026-09-04.

Employer with a benefit plan ยท SEC filer

ONTO INNOVATION

Also filed as NANOMETRICS INC

16 JONSPIN ROAD, WILMINGTON, MA 01887

EIN

94-2276314

SEC CIK

0000704532

SEC · 2026-09-04

Industry (SIC)

Measuring & Controlling Devices, NEC (3829)

SEC · 2026-09-04

State of incorporation

DE

SEC · 2026-09-04

Ticker

ONTO

SEC · 2026-09-04

Latest SEC filing

4 2026-09-04

SEC · 2026-09-04

Benefit plan 2, 2024 filing

ONTO INNOVATION, INC. 401(K) SAVINGS PLAN

DOL · 2025-10-15

Participants (start of year)

1,383

DOL · 2025-10-15

Plan features

code 2E2F2G2J2K2S2T3H3D

DOL · 2025-10-15

Plan type

Single-employer plan

DOL · 2025-10-15

Business code (NAICS)

333200

DOL · 2025-10-15

Benefit plan 501, 2024 filing

ONTO INNOVATION HEALTH AND WELFARE PLAN

DOL · 2025-09-30

Participants (start of year)

892

DOL · 2025-09-30

Plan features

code 4A4B4D4E4F4G4H4L4Q

DOL · 2025-09-30

Plan type

Single-employer plan

DOL · 2025-09-30

From DOL Form 5500 filings (EFAST2) · SEC EDGAR company filings. Latest record 2026-09-04.

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