EntityWire/Massachusetts business entity search →/ONTO INNOVATION
Employer with a benefit plan
ONTO INNOVATION
ONTO INNOVATION's Employer Identification Number (EIN) is 94-2276314.
At a glance
- EIN
- 94-2276314 · 942276314
- Legal name
- ONTO INNOVATION
- Also filed as
- NANOMETRICS INC
- Address on file
- 16 JONSPIN ROAD, WILMINGTON, MA 01887
- Records show
- SEC filer; employer with a benefit plan; state registration
- Latest record
- 2026-09-05
State registration
Texas Comptroller active franchise taxpayers file · records as of 2026-09-05
- Texas registration
- Forfeited · Foreign profit corporation
- Source: Texas Comptroller · as of 2026-09-05
- Texas document number
- 0012689006
- Source: Texas Comptroller · as of 2026-09-05
SEC records
SEC EDGAR company filings · records as of 2026-09-04
- SEC CIK
- 0000704532
- Source: SEC · as of 2026-09-04
- Industry (SIC)
- Measuring & Controlling Devices, NEC (3829)
- Source: SEC · as of 2026-09-04
- State of incorporation
- DE
- Source: SEC · as of 2026-09-04
- Ticker
- ONTO
- Source: SEC · as of 2026-09-04
- Latest SEC filing
- 4 2026-09-04
- Source: SEC · as of 2026-09-04
Benefit plans
DOL Form 5500 filings (EFAST2) · records as of 2025-10-15
- Benefit plan 2, 2024 filing
- ONTO INNOVATION, INC. 401(K) SAVINGS PLAN
- Source: DOL 5500 · as of 2025-10-15
- Participants (start of year)
- 1,383
- Source: DOL 5500 · as of 2025-10-15
- Plan features
- Profit-sharing; ERISA 404(c) plan; Participant-directed; 401(k) feature; 401(m) matching; Pension plan with defined contribution
- Source: DOL 5500 · as of 2025-10-15
- Plan type
- Single-employer plan
- Source: DOL 5500 · as of 2025-10-15
- Business code (NAICS)
- 333200
- Source: DOL 5500 · as of 2025-10-15
- Benefit plan 501, 2024 filing
- ONTO INNOVATION HEALTH AND WELFARE PLAN
- Source: DOL 5500 · as of 2025-09-30
- Participants (start of year)
- 892
- Source: DOL 5500 · as of 2025-09-30
What this record is
Public filings that carry this EIN (DOL Form 5500 filings (EFAST2), SEC EDGAR company filings and Texas Comptroller active franchise taxpayers file), shown as filed. Nothing is scraped from the IRS, and a public-record match is not IRS TIN validation.
What it is not
Registry status, formation date, and registered agent come from the Secretary of the Commonwealth, Corporations Division; see the Massachusetts business entity search.
If something is wrong
A name, address, or classification here is what the source published. To correct the source, file with it; to have this page removed, see corrections and removal.
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